Inventor · disambiguated record
Yasuhiro Tobe
Also filed as: TOBE YASUHIRO
7 granted patents·3 pending applications·35 citations·filing 2004–2018
79Inventor score
Top patents by PatentIndex Score
10 records- 0178US7381291B2Dual-chamber plasma processing apparatusASM JAPAN·Filed 2004·Granted Jun 3, 2008·24 cites·19 claims
- 0273US8522958B2Vacuum processing apparatusTOBE YASUHIRO·Filed 2009·Granted Sep 3, 2013·6 cites·9 claims
- 0371US10840069B2Plasma processing apparatus and plasma control methodTOKYO ELECTRON LTD·Filed 2018·Granted Nov 17, 2020·1 cites·17 claims
- 0468US10651071B2Substrate processing apparatus and substrate removing methodTOKYO ELECTRON LTD·Filed 2018·Granted May 12, 2020·1 cites·12 claims
- 0568US8262844B2Plasma processing apparatus, plasma processing method and storage mediumISHIKAWA HIRAKU·Filed 2008·Granted Sep 11, 2012·3 cites·14 claims
- 0649US2011240223A1Substrate processing systemTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0745US2009246941A1Deposition apparatus, deposition system and deposition methodTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0844US2010032095A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0942US8337621B2Substrate processing apparatusTOBE YASUHIRO·Filed 2007·Granted Dec 25, 2012·0 cites·11 claims
- 1041US10804082B2Substrate processing apparatus, and operation method for substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Oct 13, 2020·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →