Inventor · disambiguated record
Miyoko Noguchi
Also filed as: NOGUCHI MIYOKO
10 granted patents·391 citations·filing 1992–2001
92Inventor score
Technology areasG03F
Files withCANON KK10
Top patents by PatentIndex Score
10 records- 0197US5305054AImaging method for manufacture of microdevicesCANON KK·Filed 1992·Granted Apr 19, 1994·124 cites·59 claims
- 0291US5673102AImage farming and microdevice manufacturing method and exposure apparatus in which a light source includes four quadrants of predetermined intensityCANON KK·Filed 1995·Granted Sep 30, 1997·74 cites·54 claims
- 0386US6128068AProjection exposure apparatus including an illumination optical system that forms a secondary light source with a particular intensity distributionCANON KK·Filed 1995·Granted Oct 3, 2000·52 cites·2 claims
- 0482US5436692AProjection exposure apparatus and semiconductor device manufacturing methodCANON KK·Filed 1994·Granted Jul 25, 1995·34 cites·36 claims
- 0576US5424803AProjection exposure apparatus and semiconductor device manufacturing methodCANON KK·Filed 1994·Granted Jun 13, 1995·26 cites·41 claims
- 0673US5587834ASemiconductor device manufacturing method and projection exposure apparatus using the sameCANON KK·Filed 1993·Granted Dec 24, 1996·27 cites·4 claims
- 0770US6473160B2Projection exposure apparatus and device manufacturing method including an aperture member having a circular light transmitting portion and a light blocking memberCANON KK·Filed 2001·Granted Oct 29, 2002·7 cites·11 claims
- 0870US6084655AImaging method for manufacture of microdevicesCANON KK·Filed 1997·Granted Jul 4, 2000·24 cites·2 claims
- 0961US6271909B1Exposure apparatus and device manufacturing method including changing a photo-intensity distribution of a light source and adjusting an illuminance distribution on a substrate in accordance with the changeCANON KK·Filed 1995·Granted Aug 7, 2001·13 cites·32 claims
- 1050US6107007ALithography processCANON KK·Filed 1993·Granted Aug 22, 2000·10 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →