Inventor · disambiguated record
Kouichi Ohto
Also filed as: OHTO KOUICHI
3 granted patents·46 citations·filing 1998–2006
72Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0187US7420279B2Carbon containing silicon oxide film having high ashing tolerance and adhesionNEC ELECTRONICS CORP·Filed 2006·Granted Sep 2, 2008·13 cites·7 claims
- 0262US6124213AProcess of fabricating semiconductor device having ashing step for photo-resist mask in plasma produced from Nx Hy gasNEC CORP·Filed 1998·Granted Sep 26, 2000·27 cites·11 claims
- 0360US7102236B2Carbon containing silicon oxide film having high ashing tolerance and adhesionNEC ELECTRONICS CORP·Filed 2004·Granted Sep 5, 2006·6 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →