Inventor · disambiguated record
Aijun Zeng
Also filed as: ZENG AIJUN
7 granted patents·6 citations·filing 2011–2018
72Inventor score
Top patents by PatentIndex Score
7 records- 0172US9297744B2Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real timeSHANGHAI INST OPTICS & FINE ME·Filed 2014·Granted Mar 29, 2016·3 cites·8 claims
- 0267US9121788B2Device and method for detecting optical performance of beam shaping elementZHU JING·Filed 2011·Granted Sep 1, 2015·3 cites·10 claims
- 0338US9323052B2Lithography pupil shaping optical system and method for generating off-axis illumination modeSHANGHAI INST OPTICS & FINE ME·Filed 2013·Granted Apr 26, 2016·0 cites·2 claims
- 0435US11726407B2Integrated super-resolution laser direct-writing device and direct-writing methodSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2018·Granted Aug 15, 2023·0 cites·8 claims
- 0534US9804502B2Illumination device and method for using the same in the projection lithography machineSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2015·Granted Oct 31, 2017·0 cites·4 claims
- 0632US9709896B2Illumination system for lithographic projection exposure step-and-scan apparatusSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2015·Granted Jul 18, 2017·0 cites·7 claims
- 0729US9400433B2Lithography illumination systemSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2015·Granted Jul 26, 2016·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →