Inventor · disambiguated record
Rajasekhar Rao
Also filed as: RAO RAJASEKHAR · RAO RAJASEKHAR M
10 granted patents·3 pending applications·288 citations·filing 2001–2012
90Inventor score
Top patents by PatentIndex Score
13 records- 0198US6535531B1Gas discharge laser with pulse multiplierCYMER INC·Filed 2001·Granted Mar 18, 2003·166 cites·9 claims
- 0293US6750972B2Gas discharge ultraviolet wavemeter with enhanced illuminationCYMER INC·Filed 2002·Granted Jun 15, 2004·55 cites·15 claims
- 0385US6912052B2Gas discharge MOPA laser spectral analysis moduleCYMER INC·Filed 2003·Granted Jun 28, 2005·22 cites·152 claims
- 0480US7643528B2Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2007·Granted Jan 5, 2010·6 cites·11 claims
- 0575US8284815B2Very high power laser chamber optical improvementsYE HONG·Filed 2009·Granted Oct 9, 2012·5 cites·13 claims
- 0671US7852889B2Active spectral control of DUV light sourceCYMER INC·Filed 2006·Granted Dec 14, 2010·3 cites·21 claims
- 0770US6894785B2Gas discharge MOPA laser spectral analysis moduleCYMER INC·Filed 2003·Granted May 17, 2005·11 cites·96 claims
- 0870US6873418B1Optical mountings for gas discharge MOPA laser spectral analysis moduleCYMER INC·Filed 2003·Granted Mar 29, 2005·14 cites·35 claims
- 0967US8982922B2Very high power laser chamber optical improvementsYE HONG·Filed 2012·Granted Mar 17, 2015·2 cites·17 claims
- 1066US7292343B2Gas discharge MOPA laser spectral analysis moduleCYMER INC·Filed 2005·Granted Nov 6, 2007·4 cites·51 claims
- 1151US2010074295A1Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2009·Application pending·0 cites
- 1240US2006209916A1Very high repetition rate narrow band gas discharge laser systemHOLTAWAY EDWARD P·Filed 2006·Application pending·0 cites
- 1334US2005100072A1High power laser output beam energy density reductionFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →