Inventor · disambiguated record
Kimiharu Matsumura
Also filed as: MATSUMURA KIMIHARU
7 granted patents·749 citations·filing 1987–1993
89Inventor score
Top patents by PatentIndex Score
7 records- 0195US4812201AMethod of ashing layers, and apparatus for ashing layersTOKYO ELECTRON LTD·Filed 1987·Granted Mar 14, 1989·481 cites·4 claims
- 0290US5445699AProcessing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surfaceTEL KYUSHU KK·Filed 1993·Granted Aug 29, 1995·92 cites·14 claims
- 0382US5254367ACoating method and apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Oct 19, 1993·42 cites·5 claims
- 0477US5151871AMethod for heat-processing semiconductor device and apparatus for the sameTOKYO ELECTRON LTD·Filed 1990·Granted Sep 29, 1992·69 cites·12 claims
- 0567US5249142AIndirect temperature-measurement of films formed on semiconductor wafersTEL KYUSHU KK·Filed 1992·Granted Sep 28, 1993·34 cites·12 claims
- 0654US5225663AHeat process deviceTEL KYUSHU KK·Filed 1991·Granted Jul 6, 1993·25 cites·5 claims
- 0735US5038608AMethod for measuring the flow rate of exhaust gasTOKYO ELECTRON LTD·Filed 1990·Granted Aug 13, 1991·6 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →