Inventor · disambiguated record
Koji Ato
Also filed as: ATO KOJI
7 granted patents·6 pending applications·151 citations·filing 1998–2018
86Inventor score
Top patents by PatentIndex Score
13 records- 0183US6248009B1Apparatus for cleaning substrateEBARA CORP·Filed 2000·Granted Jun 19, 2001·30 cites·12 claims
- 0278US6494985B1Method and apparatus for polishing a substrateEBARA CORP·Filed 1999·Granted Dec 17, 2002·44 cites·15 claims
- 0373US6439962B1Cleaning apparatusEBARA CORP·Filed 1999·Granted Aug 27, 2002·46 cites·36 claims
- 0472US7850817B2Polishing device and substrate processing deviceEBARA CORP·Filed 2003·Granted Dec 14, 2010·15 cites·9 claims
- 0559US7621457B2Reader / writer and method for manufacturing the sameSHINKO ELECTRIC IND CO·Filed 2006·Granted Nov 24, 2009·2 cites·2 claims
- 0654US6148463ACleaning apparatusEBARA CORP·Filed 1998·Granted Nov 21, 2000·14 cites·9 claims
- 0742US10396017B2Lead frameSHINKO ELECTRIC IND CO·Filed 2018·Granted Aug 27, 2019·0 cites·20 claims
- 0841US2004155013A1Method and apparatus for polishing a substrateFiled 2004·Application pending·0 cites
- 0940US2003051812A1Method and apparatus for polishing a substrateFiled 2002·Application pending·0 cites
- 1037US2005081890A1Dehydration drying method and apparatus, and substrate processing apparatusFiled 2003·Application pending·0 cites
- 1135US2017162520A1Lead frame, electronic component device, and methods of manufacturing themSHINKO ELECTRIC IND CO·Filed 2016·Application pending·0 cites
- 1233US2005252535A1Substrate cleaning apparatus and methodNISHIOKA YUKIKO·Filed 2004·Application pending·0 cites
- 1333US2018138107A1Lead frame and electronic component deviceSHINKO ELECTRIC IND CO·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →