Inventor · disambiguated record
Jarmo Maula
Also filed as: MAULA JARMO · MAULA JARMO I · MAULA JARMO ILMARI
13 granted patents·11 pending applications·536 citations·filing 2003–2019
92Inventor score
Top patents by PatentIndex Score
24 records- 0197US7021330B2Diaphragm valve with reliability enhancements for atomic layer depositionPLANAR SYSTEMS INC·Filed 2003·Granted Apr 4, 2006·384 cites·66 claims
- 0292US7141095B2Precursor material delivery system for atomic layer depositionPLANAR SYSTEMS INC·Filed 2003·Granted Nov 28, 2006·40 cites·36 claims
- 0386US9290840B2Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the sameMAULA JARMO·Filed 2010·Granted Mar 22, 2016·4 cites·22 claims
- 0484US7294360B2Conformal coatings for micro-optical elements, and method for making the samePLANAR SYSTEMS INC·Filed 2003·Granted Nov 13, 2007·20 cites·49 claims
- 0584US6941963B2High-speed diaphragm valve for atomic layer depositionPLANAR SYSTEMS INC·Filed 2003·Granted Sep 13, 2005·31 cites·38 claims
- 0684US6907897B2Diaphragm valve for high-temperature precursor supply in atomic layer depositionPLANAR SYSTEMS INC·Filed 2003·Granted Jun 21, 2005·30 cites·50 claims
- 0782US7191793B2Diaphragm valve for atomic layer depositionPLANAR SYSTEMS INC·Filed 2006·Granted Mar 20, 2007·10 cites·33 claims
- 0881US7901736B2Multilayer material and method of preparing samePLANAR SYSTEMS OY·Filed 2005·Granted Mar 8, 2011·11 cites·16 claims
- 0979US9892814B2Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the sameBENEQ OY·Filed 2016·Granted Feb 13, 2018·1 cites·8 claims
- 1079US8367561B2Method in depositing metal oxide materialsBENEQ OY·Filed 2008·Granted Feb 5, 2013·3 cites·22 claims
- 1173US2019203356A1Arrangement for processing substrate and substrate carrierBENEQ OY·Filed 2019·Application pending·0 cites
- 1272US8945676B2Method and apparatus for coatingMAULA JARMO·Filed 2010·Granted Feb 3, 2015·2 cites·10 claims
- 1368US2017268106A1Arrangement for processing substrate and substrate carrierBENEQ OY·Filed 2017·Application pending·0 cites
- 1457US2012055407A1Arrangement for processing substrate and substrate carrierMAULA JARMO·Filed 2010·Application pending·0 cites
- 1556US2007089674A1Precursor material delivery system with thermal enhancements for atomic layer depositionPLANAR SYSTEMS INC·Filed 2006·Application pending·0 cites
- 1656US2007117383A1Precursor material delivery system with staging volume for atomic layer depositionPLANAR SYSTEMS INC·Filed 2006·Application pending·0 cites
- 1753US10590536B2Apparatus, method and reaction chamberBENEQ OY·Filed 2018·Granted Mar 17, 2020·0 cites·5 claims
- 1851US2013130044A1Method for forming a decorative coating on a gemstone, a decorative coating on a gemstone, and uses of the sameMAULA JARMO·Filed 2010·Application pending·0 cites
- 1947US2008063802A1Conformal coatings for micro-optical elementsPLANAR SYSTEMS INC·Filed 2007·Application pending·0 cites
- 2043US2012218638A1Method for forming a decorative coating, a coating, and uses of the sameMAULA JARMO·Filed 2010·Application pending·0 cites
- 2142US2011265720A1Gas deposition reactorBENEQ OY·Filed 2010·Application pending·0 cites
- 2240US10167551B2Apparatus, method and reaction chamberSODERLUND MIKKO·Filed 2012·Granted Jan 1, 2019·0 cites·6 claims
- 2339US2012177903A1Multilayer coating, method for fabricating a multilayer coating, and uses for the sameSNECK SAMI·Filed 2010·Application pending·0 cites
- 2436US2012120514A1Structure comprising at least one reflecting thin-film on a surface of a macroscopic object, method for fabricating a structure, and uses for the sameMAULA JARMO·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →