Inventor · disambiguated record
Nobuyuki Shibayama
Also filed as: SHIBAYAMA NOBUYUKI
18 granted patents·5 pending applications·27 citations·filing 2003–2022
90Inventor score
Top patents by PatentIndex Score
23 records- 0183US11018034B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2019·Granted May 25, 2021·3 cites·16 claims
- 0283US10720333B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jul 21, 2020·2 cites·12 claims
- 0380US11217452B2Substrate processing device and substrate processing method for carrying out chemical treatment for substrateSCREEN HOLDINGS CO LTD·Filed 2020·Granted Jan 4, 2022·1 cites·9 claims
- 0479US10058900B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2014·Granted Aug 28, 2018·3 cites·5 claims
- 0578US9786527B2Substrate processing device and substrate processing method for carrying out chemical treatment for substrateSCREEN HOLDINGS CO LTD·Filed 2017·Granted Oct 10, 2017·2 cites·7 claims
- 0676US10002770B2Substrate processing device and substrate processing method for carrying out chemical treatment for substrateSCREEN HOLDINGS CO LTD·Filed 2013·Granted Jun 19, 2018·3 cites·11 claims
- 0773US2022189782A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2022·Application pending·0 cites
- 0871US11052432B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2019·Granted Jul 6, 2021·1 cites·30 claims
- 0970US11342190B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted May 24, 2022·0 cites·12 claims
- 1069US11710629B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2021·Granted Jul 25, 2023·0 cites·12 claims
- 1166US7237562B2Substrate processing apparatus and control method of inert gas concentrationDAINIPPON SCREEN MFG·Filed 2003·Granted Jul 3, 2007·11 cites·7 claims
- 1265US10854479B2Substrate processing method and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2017·Granted Dec 1, 2020·1 cites·13 claims
- 1362US11881419B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2021·Granted Jan 23, 2024·0 cites·6 claims
- 1459US10199231B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2014·Granted Feb 5, 2019·0 cites·15 claims
- 1558US11094529B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Aug 17, 2021·0 cites·6 claims
- 1657US10978317B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2019·Granted Apr 13, 2021·0 cites·6 claims
- 1752US2018254190A1Substrate processing device and substrate processing method for carrying out chemical treatment for substrateSCREEN HOLDINGS CO LTD·Filed 2018·Application pending·0 cites
- 1850US2014051259A1Substrate processing device and substrate processing method for carrying out chemical treatment for substrateDAINIPPON SCREEN MFG·Filed 2013·Application pending·0 cites
- 1949US11011398B2Fume determination method, substrate processing method, and substrate processing equipmentSCREEN HOLDINGS CO LTD·Filed 2018·Granted May 18, 2021·0 cites·14 claims
- 2043US10672627B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jun 2, 2020·0 cites·9 claims
- 2143US2019295839A1Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2019·Application pending·0 cites
- 2241US2003230236A1Substrate processing apparatus and control method of inert gas concentrationDAINIPPON SCREEN MFG·Filed 2003·Application pending·0 cites
- 2334US11764055B2Substrate processing method and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2017·Granted Sep 19, 2023·0 cites·11 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →