Inventor · disambiguated record
Kun-Shu Yang
Also filed as: YANG KUN-SHU
2 granted patents·20 citations·filing 2013–2014
59Inventor score
Files withCABOT MICROELECTRONICS CORP2
Top patents by PatentIndex Score
2 records- 0187US9409276B2CMP polishing pad having edge exclusion region of offset concentric groove patternCABOT MICROELECTRONICS CORP·Filed 2014·Granted Aug 9, 2016·11 cites·7 claims
- 0281US9687956B2Polishing pad with offset concentric grooving pattern and method for polishing a substrate therewithCABOT MICROELECTRONICS CORP·Filed 2013·Granted Jun 27, 2017·9 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →