Inventor · disambiguated record
Dewen Zhao
Also filed as: ZHAO DEWEN
2 granted patents·2 pending applications·8 citations·filing 2011–2011
46Inventor score
Top patents by PatentIndex Score
4 records- 0178US9138857B2Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the sameLU XINCHUN·Filed 2011·Granted Sep 22, 2015·8 cites·14 claims
- 0237US9377286B2Device for globally measuring thickness of metal filmLU XINCHUN·Filed 2011·Granted Jun 28, 2016·0 cites·5 claims
- 0334US2012315826A1Device and Method for Measuring Physical Parameters of Slurry and Chemical Mechanical Polishing Apparatus Comprising the DeviceLU XINCHUN·Filed 2011·Application pending·0 cites
- 0432US2013000845A1Device and Method for Measuring Thickness of Slurry and Chemical Mechanical Polishing Apparatus Comprising the DeviceUNIV TSINGHUA·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →