Inventor · disambiguated record
Pan Shen
Also filed as: SHEN PAN
3 granted patents·4 pending applications·10 citations·filing 2011–2019
59Inventor score
Top patents by PatentIndex Score
7 records- 0178US9138857B2Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the sameLU XINCHUN·Filed 2011·Granted Sep 22, 2015·8 cites·14 claims
- 0256US8912790B2Measuring device for measuring film thickness of silicon waferLU XINCHUN·Filed 2011·Granted Dec 16, 2014·2 cites·17 claims
- 0345US2022278243A1Solar cell string, solar cell module, solar cell sheet and manufacturing method thereforLONGI SOLAR TECH TAIZHOU CO LTD·Filed 2019·Application pending·0 cites
- 0439US2021329893A1Method for establishing an oral ulcer animal model with yin-deficiency and fire-excess syndrome based on sleep deprivationUNIV SUN YAT SEN·Filed 2019·Application pending·0 cites
- 0538US9255780B2Method for measuring thickness of film on wafer edgeLU XINCHUN·Filed 2011·Granted Feb 9, 2016·0 cites·12 claims
- 0634US2012115403A1Pad conditioner head for conditioning a polishing padLU XINCHUN·Filed 2011·Application pending·0 cites
- 0728US2013273819A1Wafer transfer device for chemical mechanical polishing apparatusLU XINCHUN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →