Inventor · disambiguated record
Eric Vella
Also filed as: VELLA ERIC · VELLA ERIC N
8 granted patents·1 pending application·113 citations·filing 2002–2023
86Inventor score
Top patents by PatentIndex Score
9 records- 0188US6833913B1Apparatus and methods for optically inspecting a sample for anomaliesKLA TENCOR TECH CORP·Filed 2002·Granted Dec 21, 2004·44 cites·50 claims
- 0283US11131629B2Apparatus and methods for measuring phase and amplitude of light through a layerKLA TENCOR CORP·Filed 2018·Granted Sep 28, 2021·3 cites·24 claims
- 0380US6686995B2Two-dimensional UV compatible programmable spatial filterKLA TENCOR TECH CORP·Filed 2002·Granted Feb 3, 2004·26 cites·30 claims
- 0476US9875534B2Techniques and systems for model-based critical dimension measurementsKLA TENCOR CORP·Filed 2016·Granted Jan 23, 2018·3 cites·23 claims
- 0575US7012683B2Apparatus and methods for optically inspecting a sample for anomaliesKLA TENCOR TECH CORP·Filed 2004·Granted Mar 14, 2006·13 cites·19 claims
- 0673US6775051B2Systems and methods for scanning a beam of light across a specimenKLA TENCOR TECHNOLOGIES·Filed 2002·Granted Aug 10, 2004·16 cites·42 claims
- 0768US12092814B2Correcting aberration and apodization of an optical system using correction platesKLA CORP·Filed 2022·Granted Sep 17, 2024·0 cites·38 claims
- 0860US6686994B2UV compatible programmable spatial filterKLA TENCOR TECH CORP·Filed 2002·Granted Feb 3, 2004·8 cites·31 claims
- 0955US2024280828A1Rectangular cuboid, non-polarizing beam splitter that avoids interference fringes from surface reflectionsKLA CORP·Filed 2023·Application pending·0 cites
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