Inventor · disambiguated record
Tamaki Takeyama
Also filed as: TAKEYAMA TAMAKI
4 granted patents·3 pending applications·8 citations·filing 2006–2023
64Inventor score
Top patents by PatentIndex Score
7 records- 0191US11081322B2Film forming apparatus, cleaning method for film forming apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Aug 3, 2021·5 cites·8 claims
- 0281US11939665B2Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming methodTOKYO ELECTRON LTD·Filed 2021·Granted Mar 26, 2024·1 cites·28 claims
- 0359US7582571B2Substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2006·Granted Sep 1, 2009·2 cites·20 claims
- 0454US2024052950A1Automatic pressure control device, film forming apparatus and pressure control methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0553US2009220692A1Method of substrate treatment, recording medium and substrate treating apparatusTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 0651US2012118231A1Substrate processing method, storage medium, and substrate processing apparatusTAKAGI TOSHIO·Filed 2012·Application pending·0 cites
- 0744US12392026B2Method and device for substrate processingTOKYO ELECTRON LTD·Filed 2020·Granted Aug 19, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →