Inventor · disambiguated record
Ronald Franciscus Herman Hugers
Also filed as: HUGERS RONALD FRANCISCUS HERMA · HUGERS RONALD FRANCISCUS HERMAN
16 granted patents·5 pending applications·139 citations·filing 2006–2025
91Inventor score
Top patents by PatentIndex Score
21 records- 0197US7701577B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Apr 20, 2010·70 cites·13 claims
- 0295US11360396B2Mode control of photonic crystal fiber based broadband radiation sourcesASML NETHERLANDS BV·Filed 2020·Granted Jun 14, 2022·45 cites·20 claims
- 0392US11563298B2Hollow-core photonic crystal fiber based broadband radiation generatorASML NETHERLANDS BV·Filed 2021·Granted Jan 24, 2023·3 cites·20 claims
- 0487US7839506B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Nov 23, 2010·7 cites·8 claims
- 0585US2025355367A1Mode control of photonic crystal fiber based broadband radiation sourcesASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 0682US12386270B2Mode control of photonic crystal fiber based broadband radiation sourcesASML NETHERLANDS BV·Filed 2023·Granted Aug 12, 2025·0 cites·20 claims
- 0782US11619887B2Assembly for collimating broadband radiationASML NETHERLANDS BV·Filed 2020·Granted Apr 4, 2023·1 cites·21 claims
- 0880US10990021B2Metrology apparatus with radiation source having multiple broadband outputsASML NETHERLANDS BV·Filed 2020·Granted Apr 27, 2021·1 cites·15 claims
- 0979US11687009B2Mode control of photonic crystal fiber based broadband radiation sourcesASML NETHERLANDS BV·Filed 2022·Granted Jun 27, 2023·0 cites·20 claims
- 1078US12050409B2Assembly for collimating broadband radiationASML NETHERLANDS BV·Filed 2023·Granted Jul 30, 2024·0 cites·20 claims
- 1175US12237639B2Hollow-core photonic crystal fiber based broadband radiation generatorASML NETHERLANDS BV·Filed 2022·Granted Feb 25, 2025·0 cites·20 claims
- 1269US7630070B2Scatterometer, a lithographic apparatus and a focus analysis methodASML NETHERLANDS BV·Filed 2007·Granted Dec 8, 2009·2 cites·25 claims
- 1368US11275313B2Metrology apparatus with radiation source having multiple broadband outputsASML NETHERLANDS BV·Filed 2021·Granted Mar 15, 2022·0 cites·12 claims
- 1468US10520824B2Wavelength combining of multiple sourceASML NETHERLANDS BV·Filed 2017·Granted Dec 31, 2019·1 cites·20 claims
- 1568US7557934B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 7, 2009·5 cites·17 claims
- 1665US11327412B2Topography measurement systemASML NETHERLANDS BV·Filed 2016·Granted May 10, 2022·1 cites·21 claims
- 1759US8125615B2Optical focus sensor, an inspection apparatus and a lithographic apparatusKALF WILLEM·Filed 2008·Granted Feb 28, 2012·3 cites·11 claims
- 1859US2024402620A1Source selection module and associated metrology and lithographic apparatusesASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1950US2008135774A1Scatterometer, a lithographic apparatus and a focus analysis methodASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 2050US2011051129A1Inspection Apparatus, Lithographic Apparatus and Method of Measuring a Property of a SubstrateASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 2133US2011007316A1Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →