Inventor · disambiguated record
Toshiya Tsukahara
Also filed as: TSUKAHARA TOSHIYA
4 granted patents·5 pending applications·54 citations·filing 2002–2021
73Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0182USD490450SExhaust ring for semiconductor equipmentTOKYO ELECTRON LTD·Filed 2002·Granted May 25, 2004·31 cites·1 claims
- 0278US11664200B2Placing table, positioning method of edge ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted May 30, 2023·2 cites·11 claims
- 0373US7678225B2Focus ring for semiconductor treatment and plasma treatment deviceTOKYO ELECTRON LTD·Filed 2002·Granted Mar 16, 2010·21 cites·10 claims
- 0447US2021305023A1Edge ring and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0546US2021183685A1Edge ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0643US10847348B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Nov 24, 2020·0 cites·17 claims
- 0742US2020144090A1Placing table and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0841US2021217649A1Edge ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0936US2018182635A1Focus ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →