Inventor · disambiguated record
Kitaek Kang
Also filed as: KANG KITAEK
9 granted patents·2 pending applications·169 citations·filing 1999–2007
89Inventor score
Top patents by PatentIndex Score
11 records- 0190US6516244B1Wafer alignment system and methodWAFERMASTERS INC·Filed 2000·Granted Feb 4, 2003·59 cites·7 claims
- 0289US6591161B2Method for determining robot alignmentWAFERMASTERS INC·Filed 2001·Granted Jul 8, 2003·55 cites·25 claims
- 0386US7599048B2Optical emission spectroscopy process monitoring and material characterizationWAFERMASTERS INC·Filed 2007·Granted Oct 6, 2009·11 cites·32 claims
- 0481US7262918B1Light beam conditionerWAFERMASTERS INC·Filed 2006·Granted Aug 28, 2007·12 cites·24 claims
- 0578US7816152B2In situ, ex situ and inline process monitoring, optimization and fabricationWAFERMASTER INC·Filed 2007·Granted Oct 19, 2010·7 cites·12 claims
- 0676US7718554B2Focused laser beam processingWAFERMASTERS INC·Filed 2007·Granted May 18, 2010·5 cites·25 claims
- 0757US6621943B1System and method for converting analog data to digital dataWAFERMASTERS INC·Filed 2000·Granted Sep 16, 2003·7 cites·14 claims
- 0846US6636626B1Wafer mapping apparatus and methodWAFERMASTERS INC·Filed 1999·Granted Oct 21, 2003·13 cites·12 claims
- 0945US7344979B2High pressure treatment for improved grain growth and void reductionWAFERMASTERS INC·Filed 2005·Granted Mar 18, 2008·0 cites·16 claims
- 1043US2008206897A1Selective Depth Optical ProcessingYOO WOO SIK·Filed 2007·Application pending·0 cites
- 1141US2007146685A1Dynamic wafer stress management systemYOO WOO S·Filed 2007·Application pending·0 cites
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