Assignee
WAFERMASTERS INC
US·49 granted patents·1 pending application·995 citations·filing 1999–2007
Top patents by PatentIndex Score
50 records- 0195US7276457B2Selective heating using flash annealWAFERMASTERS INC·Filed 2005·Granted Oct 2, 2007·26 cites·15 claims
- 0294US6271459B1Heat management in wafer processing equipment using thermoelectric deviceWAFERMASTERS INC·Filed 2000·Granted Aug 7, 2001·86 cites·19 claims
- 0392US7198677B2Low temperature wafer backside cleaningWAFERMASTERS INC·Filed 2005·Granted Apr 3, 2007·23 cites·8 claims
- 0490US6516244B1Wafer alignment system and methodWAFERMASTERS INC·Filed 2000·Granted Feb 4, 2003·59 cites·7 claims
- 0589US6591161B2Method for determining robot alignmentWAFERMASTERS INC·Filed 2001·Granted Jul 8, 2003·55 cites·25 claims
- 0689US6379073B1Adjustable joint for a positionable armWAFERMASTERS INC·Filed 2000·Granted Apr 30, 2002·69 cites·5 claims
- 0788US6932561B2Power generation systemWAFERMASTERS INC·Filed 2003·Granted Aug 23, 2005·39 cites·11 claims
- 0886US7599048B2Optical emission spectroscopy process monitoring and material characterizationWAFERMASTERS INC·Filed 2007·Granted Oct 6, 2009·11 cites·32 claims
- 0986US7362426B1Raman and photoluminescence spectroscopyWAFERMASTERS INC·Filed 2006·Granted Apr 22, 2008·11 cites·20 claims
- 1085US7194199B2Stacked annealing systemWAFERMASTERS INC·Filed 2005·Granted Mar 20, 2007·8 cites·7 claims
- 1185US6394523B1Portable enclosure for semiconductor processingWAFERMASTERS INC·Filed 2000·Granted May 28, 2002·37 cites·16 claims
- 1282US6887803B2Gas-assisted rapid thermal processingWAFERMASTERS INC·Filed 2001·Granted May 3, 2005·24 cites·8 claims
- 1382US6602797B2Wafer processing methodWAFERMASTERS INC·Filed 2002·Granted Aug 5, 2003·24 cites·6 claims
- 1482US6240729B1Converting thermal energy to mechanical motionWAFERMASTERS INC·Filed 2000·Granted Jun 5, 2001·30 cites·20 claims
- 1581US7440094B2Optical sample characterization systemWAFERMASTERS INC·Filed 2005·Granted Oct 21, 2008·8 cites·4 claims
- 1681US7262918B1Light beam conditionerWAFERMASTERS INC·Filed 2006·Granted Aug 28, 2007·12 cites·24 claims
- 1781US6337467B1Lamp based scanning rapid thermal processingWAFERMASTERS INC·Filed 2000·Granted Jan 8, 2002·27 cites·24 claims
- 1880US7507667B2Selective heating using flash annealWAFERMASTERS INC·Filed 2007·Granted Mar 24, 2009·5 cites·20 claims
- 1980US6410455B1Wafer processing systemWAFERMASTERS INC·Filed 1999·Granted Jun 25, 2002·50 cites·11 claims
- 2079US6809035B2Hot plate annealingWAFERMASTERS INC·Filed 2002·Granted Oct 26, 2004·23 cites·20 claims
- 2176US7718554B2Focused laser beam processingWAFERMASTERS INC·Filed 2007·Granted May 18, 2010·5 cites·25 claims
- 2274US6568899B1Wafer processing system including a robotWAFERMASTERS INC·Filed 1999·Granted May 27, 2003·45 cites·4 claims
- 2373US7564547B2Spectroscopy systemWAFERMASTERS INC·Filed 2005·Granted Jul 21, 2009·7 cites·35 claims
- 2473US6840763B2Wafer processing apparatusWAFERMASTERS INC·Filed 2002·Granted Jan 11, 2005·14 cites·3 claims
- 2572US6345150B1Single wafer annealing ovenWAFERMASTERS INC·Filed 1999·Granted Feb 5, 2002·41 cites·24 claims
- 2671US7397561B2Spectroscopy systemWAFERMASTERS INC·Filed 2006·Granted Jul 8, 2008·6 cites·21 claims
- 2771US6952889B2Forced convection assisted rapid thermal furnaceWAFERMASTERS INC·Filed 2002·Granted Oct 11, 2005·14 cites·18 claims
- 2871US6879778B2Batch furnaceWAFERMASTERS INC·Filed 2002·Granted Apr 12, 2005·13 cites·18 claims
- 2971US6790475B2Source gas deliveryWAFERMASTERS INC·Filed 2002·Granted Sep 14, 2004·9 cites·23 claims
- 3070US6897162B2Integrated ashing and implant annealing methodWAFERMASTERS INC·Filed 2003·Granted May 24, 2005·10 cites·18 claims
- 3170US6727194B2Wafer batch processing system and methodWAFERMASTERS INC·Filed 2002·Granted Apr 27, 2004·11 cites·5 claims
- 3268US6575739B1Configurable wafer furnaceWAFERMASTERS INC·Filed 2002·Granted Jun 10, 2003·12 cites·13 claims
- 3368US6212088B1Modular voltage adapter and method for using sameWAFERMASTERS INC·Filed 1999·Granted Apr 3, 2001·36 cites·20 claims
- 3467US7358200B2Gas-assisted rapid thermal processingWAFERMASTERS INC·Filed 2004·Granted Apr 15, 2008·9 cites·24 claims
- 3567US6500737B1System and method for providing defect free rapid thermal processingWAFERMASTERS INC·Filed 2000·Granted Dec 31, 2002·11 cites·25 claims
- 3666US6303906B1Resistively heated single wafer furnaceWAFERMASTERS INC·Filed 1999·Granted Oct 16, 2001·31 cites·18 claims
- 3765US6633132B2Plasma gereration apparatus and methodWAFERMASTERS INC·Filed 2001·Granted Oct 14, 2003·10 cites·14 claims
- 3863US6395648B1Wafer processing systemWAFERMASTERS INC·Filed 2000·Granted May 28, 2002·7 cites·4 claims
- 3963US6349546B1Liquid gas exchangerWAFERMASTERS INC·Filed 2000·Granted Feb 26, 2002·14 cites·38 claims
- 4060US6246031B1Mini batch furnaceWAFERMASTERS INC·Filed 1999·Granted Jun 12, 2001·24 cites·24 claims
- 4158US6698718B2Rotary valveWAFERMASTERS INC·Filed 2001·Granted Mar 2, 2004·8 cites·18 claims
- 4257US6621943B1System and method for converting analog data to digital dataWAFERMASTERS INC·Filed 2000·Granted Sep 16, 2003·7 cites·14 claims
- 4353US6500264B2Continuous thermal evaporation systemWAFERMASTERS INC·Filed 2001·Granted Dec 31, 2002·1 cites·21 claims
- 4449US7063583B2Multi-spectral uniform light sourceWAFERMASTERS INC·Filed 2001·Granted Jun 20, 2006·1 cites·12 claims
- 4548US7141513B2Integrated ashing and implant annealing method using ozoneWAFERMASTERS INC·Filed 2004·Granted Nov 28, 2006·1 cites·34 claims
- 4647US6709470B2Benchtop processingWAFERMASTERS INC·Filed 2002·Granted Mar 23, 2004·1 cites·20 claims
- 4747US6528435B1Plasma processingWAFERMASTERS INC·Filed 2000·Granted Mar 4, 2003·7 cites·18 claims
- 4846US6636626B1Wafer mapping apparatus and methodWAFERMASTERS INC·Filed 1999·Granted Oct 21, 2003·13 cites·12 claims
- 4945US7344979B2High pressure treatment for improved grain growth and void reductionWAFERMASTERS INC·Filed 2005·Granted Mar 18, 2008·0 cites·16 claims
- 5034US2007042510A1In situ process monitoring and controlWAFERMASTERS INC·Filed 2005·Application pending·0 cites
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