Inventor · disambiguated record
Shuji Hirao
Also filed as: HIRAO SHUJI
9 granted patents·5 pending applications·462 citations·filing 1993–2010
90Inventor score
Top patents by PatentIndex Score
14 records- 0196US5753536ASemiconductor device and associated fabrication methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1995·Granted May 19, 1998·310 cites·23 claims
- 0269US5693557AMethod of fabricating a semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Dec 2, 1997·29 cites·4 claims
- 0368US5385867AMethod for forming a multi-layer metallic wiring structureMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1994·Granted Jan 31, 1995·40 cites·7 claims
- 0466US5621247AMemory device with tungsten and aluminum interconnectsMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Apr 15, 1997·33 cites·15 claims
- 0558US5474949AMethod of fabricating capacitor or contact for semiconductor device by forming uneven oxide film and reacting silicon with metal containing gasMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1993·Granted Dec 12, 1995·22 cites·6 claims
- 0648US7001841B2Production method of semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Feb 21, 2006·4 cites·35 claims
- 0748US5714400AMethod for forming a memory device by utilizing variations in resistance valueMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Feb 3, 1998·15 cites·6 claims
- 0845US5661068AMethod of fabricating a semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1995·Granted Aug 26, 1997·9 cites·5 claims
- 0943US2003070941A1Apparatus and method for evaluating plating solution and apparatus and method for fabricating electronic deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Application pending·0 cites
- 1042US2007134929A1Etching method and etching apparatusHIRAO SHUJI·Filed 2006·Application pending·0 cites
- 1137US7217353B2Method and apparatus for plating substrateMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted May 15, 2007·0 cites·16 claims
- 1236US2010244265A1Semiconductor device and method for manufacturing the samePANASONIC CORP·Filed 2010·Application pending·0 cites
- 1336US2010295182A1Semiconductor device and method for manufacturing the samePANASONIC CORP·Filed 2010·Application pending·0 cites
- 1432US2001054558A1Method for producing a semiconductor deviceFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →