Inventor · disambiguated record
Felix Beyeler
Also filed as: BEYELER FELIX
7 granted patents·1 pending application·26 citations·filing 2005–2020
80Inventor score
Top patents by PatentIndex Score
8 records- 0190US9535086B2Interface of a microfabricated scanning force sensor for combined force and position sensingFEMTOTOOLS AG·Filed 2015·Granted Jan 3, 2017·9 cites·10 claims
- 0279US11435378B2MEMS-based nanoindentation force sensor with electro-thermal tip heatingFEMTO TOOLS AG·Filed 2020·Granted Sep 6, 2022·2 cites·11 claims
- 0371US7712366B2Multi-axis capacitive transducer and manufacturing method for producing itETH ZUERICH·Filed 2005·Granted May 11, 2010·7 cites·8 claims
- 0468US8984966B2Sub-millinewton capacitive MEMS force sensor for mechanical testing on a microscopeFEMTOTOOLS AG·Filed 2012·Granted Mar 24, 2015·4 cites·6 claims
- 0565US9046548B2System for mechanical characterization of materials and biological samples in the sub-millinewton force rangeBEYELER FELIX·Filed 2010·Granted Jun 2, 2015·2 cites·14 claims
- 0653US11307125B2MEMS nanoindenter chip with indenter probe and reference probeFEMTOTOOLS AG·Filed 2018·Granted Apr 19, 2022·0 cites·13 claims
- 0752US9575093B2System for the combined, probe-based mechanical and electrical testing of MEMSFEMTOTOOLS AG·Filed 2014·Granted Feb 21, 2017·2 cites·22 claims
- 0827US2012018821A1Micro force sensor package for sub-millinewton electromechanical measurementsBEYELER FELIX·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →