Inventor · disambiguated record
Jean Lu
Also filed as: LU JEAN · LU JEAN QING
6 granted patents·2 pending applications·179 citations·filing 2000–2022
84Inventor score
Top patents by PatentIndex Score
8 records- 0190US6613199B1Apparatus and method for physical vapor deposition using an open top hollow cathode magnetronNOVELLUS SYSTEMS INC·Filed 2001·Granted Sep 2, 2003·35 cites·16 claims
- 0290US6342133B2PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutterNOVELLUS SYSTEMS INC·Filed 2000·Granted Jan 29, 2002·92 cites·12 claims
- 0377US6589398B1Pasting method for eliminating flaking during nitride sputteringNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 8, 2003·26 cites·16 claims
- 0476US6471831B2Apparatus and method for improving film uniformity in a physical vapor deposition systemNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 29, 2002·14 cites·20 claims
- 0574US6468404B2Apparatus and method for reducing redeposition in a physical vapor deposition systemNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 22, 2002·12 cites·20 claims
- 0654US11802349B2Method for depositing high quality PVD filmsAPPLIED MATERIALS INC·Filed 2020·Granted Oct 31, 2023·0 cites·11 claims
- 0750US2023187204A1Tungsten Fluoride Soak And Treatment For Tungsten Oxide RemovalAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0836US2018055887A1Method for preparing induced mesenchymal stem cells and improving mesenchymal stem cell's characters and its applicationsACADEMIA SINICA·Filed 2017·Application pending·0 cites
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