Inventor · disambiguated record
Edward Yeh
Also filed as: YEH EDWARD · YEH EDWARD K
4 granted patents·2 pending applications·100 citations·filing 1999–2023
78Inventor score
Top patents by PatentIndex Score
6 records- 0177US6207565B1Integrated process for ashing resist and treating silicon after masked spacer etchVLSI TECHNOLOGY INC·Filed 2000·Granted Mar 27, 2001·22 cites·14 claims
- 0275US6130166AAlternative plasma chemistry for enhanced photoresist removalVLSI TECHNOLOGY INC·Filed 1999·Granted Oct 10, 2000·49 cites·19 claims
- 0363US6342428B1Method for a consistent shallow trench etch profilePHILIPS ELECTRONICS NA·Filed 1999·Granted Jan 29, 2002·28 cites·25 claims
- 0453US2024421002A1Integrated circuit device with multi-length gate electrodeINTEL CORP·Filed 2023·Application pending·0 cites
- 0537US2005073021A1Selective etch shallow trench isolation barrier integrated circuit chip and fabrication methodFiled 2004·Application pending·0 cites
- 0628US6727166B1Removal of silicon oxynitride material using a wet chemical process after gate etch processingKONINKL PHILIPS ELECTRONICS NV·Filed 1999·Granted Apr 27, 2004·1 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →