Inventor · disambiguated record
Kevin Madrigal
Also filed as: MADRIGAL KEVIN
6 granted patents·2 pending applications·53 citations·filing 2011–2023
79Inventor score
Top patents by PatentIndex Score
8 records- 0193US9719169B2System and apparatus for flowable deposition in semiconductor fabricationMOHN JONATHAN D·Filed 2011·Granted Aug 1, 2017·31 cites·18 claims
- 0292US9728380B2Dual-plenum showerhead with interleaved plenum sub-volumesNOVELLUS SYSTEMS INC·Filed 2015·Granted Aug 8, 2017·11 cites·20 claims
- 0387US9121097B2Variable showerhead flow by varying internal baffle conductanceMOHN JONATHAN D·Filed 2012·Granted Sep 1, 2015·10 cites·23 claims
- 0458US10107490B2Configurable liquid precursor vaporizerLAM RES CORP·Filed 2014·Granted Oct 23, 2018·0 cites·18 claims
- 0557US9284644B2Apparatus and method for improving wafer uniformityLAM RES CORP·Filed 2014·Granted Mar 15, 2016·1 cites·24 claims
- 0651US2025305124A1In situ treatment of molybdenum oxyhalide byproducts in semiconductor processing equipmentLAM RES CORP·Filed 2023·Application pending·0 cites
- 0751US2023034561A1Ammonia abatement for improved roughing pump performanceLAM RES CORP·Filed 2021·Application pending·0 cites
- 0847US9863041B2Internally heated porous filter for defect reduction with liquid or solid precursorsLAM RES CORP·Filed 2015·Granted Jan 9, 2018·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →