Inventor · disambiguated record
Karl R. Umstadter
Also filed as: UMSTADTER KARL · UMSTADTER KARL R · UMSTADTER KARL ROBERT
6 granted patents·6 pending applications·9 citations·filing 2005–2020
72Inventor score
Top patents by PatentIndex Score
12 records- 0172US9268031B2Advanced debris mitigation of EUV light sourceUMSTADTER KARL R·Filed 2013·Granted Feb 23, 2016·5 cites·43 claims
- 0261US9155180B1System and method of simultaneously fueling and mitigating debris for a plasma-based illumination sourceKLA TENCOR CORP·Filed 2012·Granted Oct 6, 2015·2 cites·29 claims
- 0358US8917432B2Multiplexing EUV sources in reticle inspectionWACK DANIEL·Filed 2012·Granted Dec 23, 2014·2 cites·19 claims
- 0449US10128016B2EUV element having barrier to hydrogen transportASML NETHERLANDS BV·Filed 2016·Granted Nov 13, 2018·0 cites·43 claims
- 0546US2006233968A1System and method for vaporizing a metalOHKAWA TIHIRO·Filed 2005·Application pending·0 cites
- 0645US12332570B2Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debrisASML HOLDING NV·Filed 2020·Granted Jun 17, 2025·0 cites·15 claims
- 0745US9156068B2Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiationKLA TENCOR CORP·Filed 2014·Granted Oct 13, 2015·0 cites·38 claims
- 0845US2007172601A1System and method for vaporizing powdersPUTVINSKI SERGEI·Filed 2006·Application pending·0 cites
- 0943US2006261522A1System and method for vaporizing a solid materialOHKAWA TIHIRO·Filed 2005·Application pending·0 cites
- 1042US2014158894A1Method and device using photoelectrons for in-situ beam power and stability monitoring in euv systemsKLA TENCOR CORP·Filed 2013·Application pending·0 cites
- 1139US2014158914A1Optical component with blocking surface and method thereofSANDIA CORP·Filed 2013·Application pending·0 cites
- 1238US2014166051A1Apparatus, system, and method for separating gases and mitigating debris in a controlled pressure environmentKLA TENCOR CORP·Filed 2013·Application pending·0 cites
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