Inventor · disambiguated record
Kazunari Terakawa
Also filed as: TERAKAWA KAZUNARI
2 granted patents·1 pending application·6 citations·filing 2001–2007
51Inventor score
Files withIBM3
Top patents by PatentIndex Score
3 records- 0157US7525651B2Inspection apparatus and inspection method for pattern profile, and exposure apparatusIBM·Filed 2007·Granted Apr 28, 2009·1 cites·15 claims
- 0257US7310141B2Inspection device and inspection method for pattern profile, exposure systemIBM·Filed 2002·Granted Dec 18, 2007·5 cites·4 claims
- 0339US2002113959A1Method and apparatus for inspecting resist patternIBM·Filed 2001·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Kazunari Terakawa files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →