Inventor · disambiguated record
Fumikazu Itoh
Also filed as: ITOH FUMIKAZU
20 granted patents·1,484 citations·filing 1978–1996
97Inventor score
Files withHITACHI LTD20
Top patents by PatentIndex Score
20 records- 0197US5055696AMultilayered device micro etching method and systemHITACHI LTD·Filed 1989·Granted Oct 8, 1991·207 cites·19 claims
- 0296US5825035AProcessing method and apparatus using focused ion beam generating meansHITACHI LTD·Filed 1996·Granted Oct 20, 1998·140 cites·16 claims
- 0395US5504340AProcess method and apparatus using focused ion beam generating meansHITACHI LTD·Filed 1994·Granted Apr 2, 1996·94 cites·37 claims
- 0494US4983540AMethod of manufacturing devices having superlattice structuresHITACHI LTD·Filed 1988·Granted Jan 8, 1991·123 cites·27 claims
- 0593US5583344AProcess method and apparatus using focused ion beam generating meansHITACHI LTD·Filed 1996·Granted Dec 10, 1996·73 cites·6 claims
- 0692US5656811AMethod for making specimen and apparatus thereofHITACHI LTD·Filed 1995·Granted Aug 12, 1997·138 cites·27 claims
- 0791US5683547AProcessing method and apparatus using focused energy beamHITACHI LTD·Filed 1994·Granted Nov 4, 1997·156 cites·5 claims
- 0890US5358806APhase shift mask, method of correcting the same and apparatus for carrying out the methodHITACHI LTD·Filed 1992·Granted Oct 25, 1994·70 cites·25 claims
- 0987US6753253B1Method of making wiring and logic corrections on a semiconductor device by use of focused ion beamsHITACHI LTD·Filed 1990·Granted Jun 22, 2004·97 cites·19 claims
- 1087US5223109AIon beam processing method and apparatusHITACHI LTD·Filed 1991·Granted Jun 29, 1993·52 cites·5 claims
- 1186US5086015AMethod of etching a semiconductor device by an ion beamHITACHI LTD·Filed 1989·Granted Feb 4, 1992·75 cites·10 claims
- 1284US5342448AApparatus for processing a sample using a charged beam and reactive gasesHITACHI LTD·Filed 1993·Granted Aug 30, 1994·39 cites·14 claims
- 1380US5447614AMethod of processing a sample using a charged beam and reactive gases and system employing the sameHITACHI LTD·Filed 1994·Granted Sep 5, 1995·31 cites·8 claims
- 1477US5229607ACombination apparatus having a scanning electron microscope thereinHITACHI LTD·Filed 1991·Granted Jul 20, 1993·47 cites·29 claims
- 1573US5113072ADevice having superlattice structure, and method of and apparatus for manufacturing the sameHITACHI LTD·Filed 1990·Granted May 12, 1992·48 cites·33 claims
- 1672US5439763AOptical mask and method of correcting the sameHITACHI LTD·Filed 1993·Granted Aug 8, 1995·24 cites·24 claims
- 1768US5026664AMethod of providing a semiconductor IC device with an additional conduction pathHITACHI LTD·Filed 1989·Granted Jun 25, 1991·35 cites·26 claims
- 1859US4184644AWinding machineHITACHI LTD·Filed 1978·Granted Jan 22, 1980·11 cites·4 claims
- 1953US4449293ACoil winding and inserting machineHITACHI LTD·Filed 1982·Granted May 22, 1984·14 cites·5 claims
- 2044US4299023AMachine for winding and inserting coilsHITACHI LTD·Filed 1980·Granted Nov 10, 1981·10 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →