Inventor · disambiguated record
Gregory Dibello
Also filed as: DIBELLO GREGORY · DIBELLO GREGORY W · DIBELLO GREGORY WAYNE
2 granted patents·1 pending application·24 citations·filing 2003–2004
60Inventor score
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3 records- 0169US6914015B2HDP process for high aspect ratio gap fillingIBM·Filed 2003·Granted Jul 5, 2005·14 cites·23 claims
- 0264US7119016B2Deposition of carbon and nitrogen doped poly silicon films, and retarded boron diffusion and improved poly depletionAPPLIED MATERIALS INC·Filed 2003·Granted Oct 10, 2006·10 cites·5 claims
- 0348US2005109276A1Thermal chemical vapor deposition of silicon nitride using BTBAS bis(tertiary-butylamino silane) in a single wafer chamberAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
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