Inventor · disambiguated record
Boris Grek
Also filed as: GREK BORIS
20 granted patents·3 pending applications·399 citations·filing 1998–2018
95Inventor score
Top patents by PatentIndex Score
23 records- 0196US7514305B1Apparatus and methods for improving the intensity profile of a beam image used to process a substrateULTRATECH INC·Filed 2006·Granted Apr 7, 2009·37 cites·22 claims
- 0292US7744274B1Methods and apparatus for temperature measurement and control on a remote substrate surfaceULTRATECH INC·Filed 2007·Granted Jun 29, 2010·30 cites·20 claims
- 0392US7176405B2Heat shield for thermal processingULTRATECH INC·Filed 2005·Granted Feb 13, 2007·17 cites·22 claims
- 0490US6507405B1Fiber-optic interferometer employing low-coherence-length light for precisely measuring absolute distance and tiltULTRATECH STEPPER INC·Filed 1999·Granted Jan 14, 2003·95 cites·21 claims
- 0587US8153930B1Apparatus and methods for improving the intensity profile of a beam image used to process a substrateHAWRYLUK ANDREW M·Filed 2009·Granted Apr 10, 2012·8 cites·19 claims
- 0687US7879741B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2006·Granted Feb 1, 2011·10 cites·18 claims
- 0786US7148159B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2003·Granted Dec 12, 2006·31 cites·17 claims
- 0885US7238915B2Methods and apparatus for irradiating a substrate to avoid substrate edge damageULTRATECH INC·Filed 2005·Granted Jul 3, 2007·8 cites·14 claims
- 0985US6347176B1Acousto-optical light tunnel apparatus and methodULTRATECH STEPPER INC·Filed 2000·Granted Feb 12, 2002·32 cites·25 claims
- 1085US6097488AMethod and apparatus for measuring micro structures, anisotropy and birefringence in polymers using laser scattered lightUNIV PRINCETON·Filed 1998·Granted Aug 1, 2000·86 cites·22 claims
- 1181US7440655B2Duplex arrayed waveguide gratingANDEVICES INC·Filed 2005·Granted Oct 21, 2008·14 cites·28 claims
- 1280US8742286B1Apparatus and method for improving the intensity profile of a beam image used to process a substrateHAWRYLUK ANDREW M·Filed 2012·Granted Jun 3, 2014·3 cites·3 claims
- 1380US7292616B2CO2 laser stabilization systems and methodsULTRATECH INC·Filed 2005·Granted Nov 6, 2007·6 cites·4 claims
- 1479US7639908B2Broadcasting arrayed waveguideENABLENCE USA COMPONENTS INC·Filed 2008·Granted Dec 29, 2009·8 cites·10 claims
- 1569US7840104B2Ultra-wide band AWG multiplexerENABLENCE USA COMPONENTS INC·Filed 2007·Granted Nov 23, 2010·5 cites·18 claims
- 1666US7403284B2Integrated optics based high-resolution spectrophotometerANDEVICES INC·Filed 2004·Granted Jul 22, 2008·7 cites·43 claims
- 1761US8746975B2Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithographyBIANUCCI GIOVANNI·Filed 2012·Granted Jun 10, 2014·2 cites·26 claims
- 1860US9401278B2Apparatus and methods for improving the intensity profile of a beam image used to process a substrateULTRATECH INC·Filed 2014·Granted Jul 26, 2016·0 cites·11 claims
- 1958US2008173620A1Apparatuses and methods for irradiating a substrate to avoid substrate edge damageULTRATECH INC·Filed 2007·Application pending·0 cites
- 2049US8314360B2Apparatuses and methods for irradiating a substrate to avoid substrate edge damageGREK BORIS·Filed 2011·Granted Nov 20, 2012·0 cites·22 claims
- 2149US2008023452A1CO2 laser stabilization systems and methodsULTRATECH INC·Filed 2007·Application pending·0 cites
- 2239US2019052369A1Techniques for high speed optoelectronic coupling by redirection of optical pathMACOM TECH SOLUTIONS HOLDINGS INC·Filed 2018·Application pending·0 cites
- 2338US8731139B2Evaporative thermal management of grazing incidence collectors for EUV lithographyGREK BORIS·Filed 2011·Granted May 20, 2014·0 cites·23 claims
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