Assignee
GREK BORIS
US·2 granted patents·0 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0149US8314360B2Apparatuses and methods for irradiating a substrate to avoid substrate edge damageGREK BORIS·Filed 2011·Granted Nov 20, 2012·0 cites·22 claims
- 0238US8731139B2Evaporative thermal management of grazing incidence collectors for EUV lithographyGREK BORIS·Filed 2011·Granted May 20, 2014·0 cites·23 claims
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