Inventor · disambiguated record
Graham M. Bates
Also filed as: BATES GRAHAM M
9 granted patents·9 citations·filing 2008–2015
79Inventor score
Top patents by PatentIndex Score
9 records- 0171US8715460B2Apparatus and method for removing a CMP pad from a platenBANDY JOHN J·Filed 2012·Granted May 6, 2014·4 cites·20 claims
- 0264US8088690B2CMP methodMCDEVITT THOMAS L·Filed 2009·Granted Jan 3, 2012·3 cites·9 claims
- 0360US8637403B2Locally tailoring chemical mechanical polishing (CMP) polish rate for dielectricsAMOAH YOBA·Filed 2011·Granted Jan 28, 2014·1 cites·20 claims
- 0459US8734665B2Slurry for chemical-mechanical polishing of copper and use thereofBATES GRAHAM M·Filed 2011·Granted May 27, 2014·1 cites·19 claims
- 0550US9708508B2Slurry for chemical-mechanical polishing of metals and use thereofGLOBALFOUNDRIES INC·Filed 2015·Granted Jul 18, 2017·0 cites·16 claims
- 0647US9221241B2Apparatus and method for removing a CMP pad from a platenGLOBALFOUNDRIES INC·Filed 2014·Granted Dec 29, 2015·0 cites·16 claims
- 0747US9057004B2Slurry for chemical-mechanical polishing of metals and use thereofBATES GRAHAM M·Filed 2011·Granted Jun 16, 2015·0 cites·18 claims
- 0843US8210904B2Slurryless mechanical planarization for substrate reclamationBATES GRAHAM M·Filed 2008·Granted Jul 3, 2012·0 cites·28 claims
- 0941US9348057B2Method and apparatus for calibrating sensors that detect wafer protrusion from a wafer cassetteIBM·Filed 2014·Granted May 24, 2016·0 cites·19 claims
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