Inventor · disambiguated record
Weinan Ye
Also filed as: YE WEINAN
7 granted patents·1 pending application·4 citations·filing 2014–2021
71Inventor score
Files withUNIV TSINGHUA8
Top patents by PatentIndex Score
8 records- 0176US11307018B2Two-degree-of-freedom heterodyne grating interferometry measurement systemUNIV TSINGHUA·Filed 2019·Granted Apr 19, 2022·2 cites·10 claims
- 0263US9903704B2Three-DOF heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Granted Feb 27, 2018·2 cites·6 claims
- 0350US11703361B2Five-degree-of-freedom heterodyne grating interferometry systemUNIV TSINGHUA·Filed 2019·Granted Jul 18, 2023·0 cites·9 claims
- 0445US12332053B2Heterodyne grating interferometry system based on secondary diffractionUNIV TSINGHUA·Filed 2021·Granted Jun 17, 2025·0 cites·9 claims
- 0543US9791789B2Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Oct 17, 2017·0 cites·4 claims
- 0642US2016138903A1Two-dof heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Application pending·0 cites
- 0741US11525673B2Five-degree-of-freedom heterodyne grating interferometry systemUNIV TSINGHUA·Filed 2018·Granted Dec 13, 2022·0 cites·12 claims
- 0834US9904183B2Coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Feb 27, 2018·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →