Inventor · disambiguated record
Masateru Morikawa
Also filed as: MORIKAWA MASATERU
17 granted patents·3 pending applications·674 citations·filing 1999–2005
96Inventor score
Files withTOKYO ELECTRON LTD19
Top patents by PatentIndex Score
20 records- 0195US6627263B2Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2002·Granted Sep 30, 2003·95 cites·12 claims
- 0293US6676757B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2000·Granted Jan 13, 2004·60 cites·12 claims
- 0393US6416583B1Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 1999·Granted Jul 9, 2002·128 cites·22 claims
- 0493US6371667B1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Apr 16, 2002·76 cites·6 claims
- 0590US6383948B1Coating film forming apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2000·Granted May 7, 2002·57 cites·19 claims
- 0688US6537373B1Method of forming film and apparatus thereofTOKYO ELECTRON LTD·Filed 2000·Granted Mar 25, 2003·36 cites·18 claims
- 0785US6616760B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Sep 9, 2003·28 cites·14 claims
- 0884US6695922B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Feb 24, 2004·32 cites·11 claims
- 0984US6599366B1Substrate processing unit and processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Jul 29, 2003·32 cites·12 claims
- 1083US6872256B2Film forming unitTOKYO ELECTRON LTD·Filed 2003·Granted Mar 29, 2005·25 cites·10 claims
- 1183US6514344B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Feb 4, 2003·28 cites·39 claims
- 1282US7087118B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2005·Granted Aug 8, 2006·6 cites·9 claims
- 1381US6605153B2Coating film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Aug 12, 2003·26 cites·8 claims
- 1475US6716478B2Coating film forming apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2002·Granted Apr 6, 2004·17 cites·7 claims
- 1571US6936107B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2003·Granted Aug 30, 2005·11 cites·21 claims
- 1671US6860945B2Substrate coating unit and substrate coating methodTOKYO ELECTRON LTD·Filed 2002·Granted Mar 1, 2005·12 cites·13 claims
- 1759US6933015B2Method of forming filmTOKYO ELECTRON LTD·Filed 2003·Granted Aug 23, 2005·5 cites·12 claims
- 1843US2005100681A1Substrate coating unit and substrate coating methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1936US2004261701A1Coating apparatus and coating methodFiled 2002·Application pending·0 cites
- 2036US2001003966A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →