Inventor · disambiguated record
David E. Suuronen
Also filed as: SUURONEN DAVID · SUURONEN DAVID E
22 granted patents·5 pending applications·283 citations·filing 1988–2018
95Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT6VARIAN SEMICONDUCTOR EQUIPMENT ASS INC6GOULD INC5GOULD ELECTRONICS INC2SUURONEN DAVID2
Top patents by PatentIndex Score
27 records- 0193US5426411ACurrent limiting fuseGOULD ELECTRONICS INC·Filed 1994·Granted Jun 20, 1995·76 cites·31 claims
- 0291US5357234ACurrent limiting fuseGOULD ELECTRONICS INC·Filed 1993·Granted Oct 18, 1994·62 cites·31 claims
- 0389US10113917B2System and method for in situ temperature measurementVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Oct 30, 2018·4 cites·12 claims
- 0486US9692325B2High conductivity electrostatic chuckSUURONEN DAVID·Filed 2011·Granted Jun 27, 2017·10 cites·25 claims
- 0581US5148141AFuse with thin film fusible element supported on a substrateGOULD INC·Filed 1991·Granted Sep 15, 1992·35 cites·28 claims
- 0681US5115220AFuse with thin film fusible element supported on a substrateGOULD INC·Filed 1991·Granted May 19, 1992·39 cites·12 claims
- 0780US9025305B2High surface resistivity electrostatic chuckCOOKE RICHARD A·Filed 2011·Granted May 5, 2015·5 cites·14 claims
- 0879US10825645B2System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing stationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Nov 3, 2020·2 cites·11 claims
- 0976US8592786B2Platen clamping surface monitoringVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Nov 26, 2013·3 cites·17 claims
- 1075US8531814B2Removal of charge between a substrate and an electrostatic clampSTONE DALE K·Filed 2010·Granted Sep 10, 2013·4 cites·8 claims
- 1172US4950195ACartridge fuse terminal adapterGOULD INC·Filed 1988·Granted Aug 21, 1990·19 cites·6 claims
- 1270US7595972B2Clamp for use in processing semiconductor workpiecesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Sep 29, 2009·3 cites·17 claims
- 1364US9953849B2Platen for reducing particle contamination on a substrate and a method thereofVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Apr 24, 2018·1 cites·13 claims
- 1463US9417280B2System and method for analyzing voltage breakdown in electrostatic chucksVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Aug 16, 2016·1 cites·18 claims
- 1562US5091712AThin film fusible elementGOULD INC·Filed 1991·Granted Feb 25, 1992·16 cites·8 claims
- 1655US10658207B2Platen for reducing particle contamination on a substrate and a method thereofVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted May 19, 2020·0 cites·11 claims
- 1753US8268081B2Platen cleaning methodSUURONEN DAVID·Filed 2008·Granted Sep 18, 2012·0 cites·7 claims
- 1851US2013037052A1Platen cleaning methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Application pending·0 cites
- 1947US7715170B2Electrostatic chuck with separated electrodesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted May 11, 2010·0 cites·17 claims
- 2047US2009122458A1Embossed electrostatic chuckVARIAN SEMICONDUCTOR EPUIPMENT·Filed 2008·Application pending·0 cites
- 2145US2011036990A1Platen to control charge accumulationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Application pending·0 cites
- 2244US9824857B2Method for implantation of semiconductor wafers having high bulk resistivityVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Nov 21, 2017·0 cites·20 claims
- 2341US8681472B2Platen ground pin for connecting substrate to groundSUURONEN DAVID E·Filed 2009·Granted Mar 25, 2014·0 cites·8 claims
- 2440US2006012939A1Clamp for use in processing semiconductor workpiecesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Application pending·0 cites
- 2537US4962977AElectric fuseGOULD INC·Filed 1989·Granted Oct 16, 1990·3 cites·28 claims
- 2636US9082804B2Triboelectric charge controlled electrostatic clampBLAKE JULIAN·Filed 2011·Granted Jul 14, 2015·0 cites·16 claims
- 2730US2006124155A1Technique for reducing backside particlesSUURONEN DAVID E·Filed 2005·Application pending·0 cites
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