Inventor · disambiguated record
Birgit Enkisch
Also filed as: ENKISCH BIRGIT
8 granted patents·1 pending application·99 citations·filing 2003–2024
86Inventor score
Top patents by PatentIndex Score
9 records- 0194US7145720B2Objective with fluoride crystal lensesZEISS CARL SMT AG·Filed 2003·Granted Dec 5, 2006·49 cites·97 claims
- 0289US7411656B2Optically polarizing retardation arrangement, and a microlithography projection exposure machineZEISS CARL SMT AG·Filed 2006·Granted Aug 12, 2008·20 cites·36 claims
- 0381US7053988B2Optically polarizing retardation arrangement, and microlithography projection exposure machineZEISS CARL SMT AG·Filed 2003·Granted May 30, 2006·20 cites·48 claims
- 0477US7126765B2Objective with fluoride crystal lensesZEISS CARL SMT AG·Filed 2005·Granted Oct 24, 2006·3 cites·14 claims
- 0565US7672044B2Lens made of a crystalline materialZEISS CARL SMT AG·Filed 2007·Granted Mar 2, 2010·3 cites·20 claims
- 0661US2025060517A1Optical system comprising an euv mirror and method for operating an optical systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0760US7180667B2Objective with fluoride crystal lensesZEISS CARL SMT AG·Filed 2004·Granted Feb 20, 2007·4 cites·56 claims
- 0853US7382536B2Objective with fluoride crystal lensesZEISS CARL SMT AG·Filed 2006·Granted Jun 3, 2008·0 cites·61 claims
- 0944US7292388B2Lens made of a crystalline materialZEISS CARL SMT AG·Filed 2004·Granted Nov 6, 2007·0 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →