Inventor · disambiguated record
Shih-Hung Li
Also filed as: LI SHIH-HUNG
8 granted patents·1,610 citations·filing 1997–2002
92Inventor score
Files withAPPLIED MATERIALS INC8
Top patents by PatentIndex Score
8 records- 0197US6063196ASemiconductor processing chamber calibration toolAPPLIED MATERIALS INC·Filed 1998·Granted May 16, 2000·406 cites·8 claims
- 0296US6773507B2Apparatus and method for fast-cycle atomic layer depositionAPPLIED MATERIALS INC·Filed 2002·Granted Aug 10, 2004·124 cites·39 claims
- 0396US6620670B2Process conditions and precursors for atomic layer deposition (ALD) of AL2O3APPLIED MATERIALS INC·Filed 2002·Granted Sep 16, 2003·217 cites·21 claims
- 0496US6274878B1Wafer out-of-pocket detection methodAPPLIED MATERIALS INC·Filed 2000·Granted Aug 14, 2001·590 cites·35 claims
- 0593US6596085B1Methods and apparatus for improved vaporization of deposition material in a substrate processing systemAPPLIED MATERIALS INC·Filed 2000·Granted Jul 22, 2003·71 cites·6 claims
- 0687US6251759B1Method and apparatus for depositing material upon a semiconductor wafer using a transition chamber of a multiple chamber semiconductor wafer processing systemAPPLIED MATERIALS INC·Filed 1998·Granted Jun 26, 2001·88 cites·9 claims
- 0779US6099596AWafer out-of-pocket detection toolAPPLIED MATERIALS INC·Filed 1997·Granted Aug 8, 2000·56 cites·18 claims
- 0878US6197117B1Wafer out-of-pocket detector and susceptor leveling toolAPPLIED MATERIALS INC·Filed 1997·Granted Mar 6, 2001·58 cites·93 claims
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