Inventor · disambiguated record
Marko Vehkamaki
Also filed as: VEHKAMAEKI MARKO · VEHKAMAKI MARKO · VEHKAMÄKI MARKO
5 granted patents·2 pending applications·90 citations·filing 1999–2025
78Inventor score
Top patents by PatentIndex Score
7 records- 0186US7108747B1Method for growing oxide thin films containing barium and strontiumASM INT·Filed 1999·Granted Sep 19, 2006·79 cites·39 claims
- 0275US9169557B2Process for producing oxide filmsHATANPAA TIMO·Filed 2010·Granted Oct 27, 2015·4 cites·16 claims
- 0372US7713584B2Process for producing oxide filmsASM INT·Filed 2005·Granted May 11, 2010·3 cites·38 claims
- 0469US8685165B2Metal oxide filmsRAHTU ANTTI·Filed 2007·Granted Apr 1, 2014·1 cites·22 claims
- 0559US7618681B2Process for producing bismuth-containing oxide filmsASM INT·Filed 2003·Granted Nov 17, 2009·3 cites·32 claims
- 0655US2006219157A1Oxide films containing titaniumRAHTU ANTTI·Filed 2005·Application pending·0 cites
- 0747US2025266265A1Methods and systems for etchingASM IP HOLDING BV·Filed 2025·Application pending·0 cites
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