Inventor · disambiguated record
Sanjay Yadav
Also filed as: YADAV SANJAY · YADAV SANJAY D
23 granted patents·10 pending applications·885 citations·filing 1999–2023
95Inventor score
Top patents by PatentIndex Score
33 records- 0199US6825134B2Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flowAPPLIED MATERIALS INC·Filed 2002·Granted Nov 30, 2004·595 cites·33 claims
- 0297US7183197B2Water-barrier performance of an encapsulating filmAPPLIED MATERIALS INC·Filed 2005·Granted Feb 27, 2007·73 cites·35 claims
- 0395US7214600B2Method to improve transmittance of an encapsulating filmAPPLIED MATERIALS INC·Filed 2005·Granted May 8, 2007·37 cites·35 claims
- 0495US6857387B1Multiple frequency plasma chamber with grounding capacitor at cathodeAPPLIED MATERIALS INC·Filed 2000·Granted Feb 22, 2005·92 cites·33 claims
- 0594US12362149B2Film stress control for plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2023·Granted Jul 15, 2025·1 cites·20 claims
- 0692US7504332B2Water-barrier performance of an encapsulating filmAPPLIED MATERIALS INC·Filed 2007·Granted Mar 17, 2009·18 cites·20 claims
- 0790US7951620B2Water-barrier encapsulation methodAPPLIED MATERIALS INC·Filed 2009·Granted May 31, 2011·16 cites·20 claims
- 0887US11854771B2Film stress control for plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·1 cites·15 claims
- 0987US11094508B2Film stress control for plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2018·Granted Aug 17, 2021·3 cites·20 claims
- 1085US10991916B2Thin-film encapsulationAPPLIED MATERIALS INC·Filed 2018·Granted Apr 27, 2021·2 cites·20 claims
- 1182US8404502B2Water-barrier encapsulation methodWON TAE K·Filed 2011·Granted Mar 26, 2013·7 cites·15 claims
- 1281US10312475B2CVD thin film stress control method for display applicationAPPLIED MATERIALS INC·Filed 2017·Granted Jun 4, 2019·3 cites·19 claims
- 1375US11053592B2Substrate temperature monitoringAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·1 cites·15 claims
- 1473US8002896B2Shadow frame with cross beam for semiconductor equipmentAPPLIED MATERIALS INC·Filed 2005·Granted Aug 23, 2011·1 cites·12 claims
- 1573US6960263B2Shadow frame with cross beam for semiconductor equipmentAPPLIED MATERIALS INC·Filed 2002·Granted Nov 1, 2005·10 cites·14 claims
- 1671US11770964B2Thin-film encapsulationAPPLIED MATERIALS INC·Filed 2021·Granted Sep 26, 2023·0 cites·20 claims
- 1765US6843258B2On-site cleaning gas generation for process chamber cleaningAPPLIED MATERIALS INC·Filed 2000·Granted Jan 18, 2005·17 cites·20 claims
- 1863US7031600B2Method and apparatus for silicon oxide deposition on large area substratesAPPLIED MATERIALS INC·Filed 2003·Granted Apr 18, 2006·4 cites·17 claims
- 1958US2006127068A1Method and apparatus for silicon oxide deposition on large area substratesAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 2057US2008178807A1Gas distribution uniformity improvement by baffle plate with multi-size holes for large size pecvd systemsWANG QUNHUA·Filed 2008·Application pending·0 cites
- 2156US2008282982A1Apparatus and method for deposition over large area substratesAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 2253US11967516B2Substrate support for chucking of mask for deposition processesAPPLIED MATERIALS INC·Filed 2020·Granted Apr 23, 2024·0 cites·20 claims
- 2351US2006228490A1Gas distribution uniformity improvement by baffle plate with multi-size holes for large size PECVD systemsAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 2450US10697063B2Corner spoiler for improving profile uniformityAPPLIED MATERIALS INC·Filed 2015·Granted Jun 30, 2020·0 cites·10 claims
- 2549US2018340257A1Diffuser for uniformity improvement in display pecvd applicationsAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2647US10751765B2Remote plasma source cleaning nozzle for cleaning a gas distribution plateAPPLIED MATERIALS INC·Filed 2018·Granted Aug 25, 2020·0 cites·19 claims
- 2745US2024047291A1High density plasma cvd for display encapsulation applicationAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2844US6981508B2On-site cleaning gas generation for process chamber cleaningAPPLIED MATERIALS INC·Filed 2004·Granted Jan 3, 2006·4 cites·26 claims
- 2941US2003066541A1Method and apparatus for enhanced chamber cleaningFiled 2002·Application pending·0 cites
- 3039US2021292894A1Temperature sensor for end point detection during plasma enhanced chemical vapor deposition chamber cleanAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 3137US6896929B2Susceptor shaft vacuum pumpingAPPLIED MATERIALS INC·Filed 2001·Granted May 24, 2005·0 cites·43 claims
- 3237US2018016677A1An improved substrate supportAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 3330US2002033183A1Method and apparatus for enhanced chamber cleaningFiled 1999·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →