Inventor · disambiguated record
Stephan Back
Also filed as: BACK STEPHAN
6 granted patents·3 pending applications·8 citations·filing 2005–2017
75Inventor score
Top patents by PatentIndex Score
9 records- 0184US7486382B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2005·Granted Feb 3, 2009·8 cites·19 claims
- 0259US2018031827A1Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
- 0358US8939587B2Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2013·Granted Jan 27, 2015·0 cites·36 claims
- 0458US2009141258A1Imaging Device in a Projection Exposure MachineZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 0557US8376559B2Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2012·Granted Feb 19, 2013·0 cites·8 claims
- 0656US9703098B2Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2016·Granted Jul 11, 2017·0 cites·4 claims
- 0753US9423695B2Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2015·Granted Aug 23, 2016·0 cites·26 claims
- 0844US8092029B2Lens module comprising at least one exchangeable optical elementSOYEZ GUIDO·Filed 2005·Granted Jan 10, 2012·0 cites·37 claims
- 0938US2008218716A1Method for setting an optical imaging property in a microlithographic projection exposure apparatus, and projection exposure apparatus of this typeZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →