Inventor · disambiguated record
Wen-Zhan Zhou
Also filed as: ZHOU WEN · ZHOU WEN-ZHAN
19 granted patents·3 pending applications·182 citations·filing 2002–2024
92Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD11UNITED MICROELECTRONICS CORP3GLOBALFOUNDRIES SG PTE LTD2RAO XUESONG2CHARTERED SEMICONDUCTOR MFG1
Top patents by PatentIndex Score
22 records- 0196US7527900B2Reticle and optical proximity correction methodUNITED MICROELECTRONICS CORP·Filed 2005·Granted May 5, 2009·136 cites·16 claims
- 0288US7238619B2Method for eliminating bridging defect in via first dual damascene processUNITED MICROELECTRONICS CORP·Filed 2005·Granted Jul 3, 2007·15 cites·14 claims
- 0382US2024393051A1Adaptive baking methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0481US10558120B2System and method for supplying and dispensing bubble-free photolithography chemical solutionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Feb 11, 2020·2 cites·20 claims
- 0580US9766554B2Method and apparatus for estimating focus and dose of an exposure processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 19, 2017·2 cites·20 claims
- 0678US2023384680A1System and method for supplying and dispensing bubble-free photolithography chemical solutionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0777US8987134B2Reliable interconnect for semiconductor deviceGLOBALFOUNDRIES SG PTE LTD·Filed 2013·Granted Mar 24, 2015·4 cites·11 claims
- 0877US7553678B2Method for detecting semiconductor manufacturing conditionsUNITED MICROELECTRONICS CORP·Filed 2006·Granted Jun 30, 2009·7 cites·18 claims
- 0976US12196491B2Adaptive baking methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 14, 2025·0 cites·20 claims
- 1066US12025917B2System and method for supplying and dispensing bubble-free photolithography chemical solutionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 2, 2024·0 cites·20 claims
- 1166US6777145B2In-line focus monitor structure and method using top-down SEMCHARTERED SEMICONDUCTOR MFG·Filed 2002·Granted Aug 17, 2004·14 cites·26 claims
- 1261US11204200B2Adaptive baking methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 21, 2021·0 cites·20 claims
- 1357US10006717B2Adaptive baking system and method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jun 26, 2018·0 cites·19 claims
- 1457US9817315B2System and method for supplying and dispensing bubble-free photolithography chemical solutionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 14, 2017·0 cites·20 claims
- 1557US7966142B2Multi-variable regression for metrologyGLOBALFOUNDRIES SG PTE LTD·Filed 2008·Granted Jun 21, 2011·1 cites·23 claims
- 1650US9034720B2Litho scanner alignment signal improvementLIU HUI·Filed 2012·Granted May 19, 2015·0 cites·17 claims
- 1746US10274839B2Two-dimensional marksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Apr 30, 2019·0 cites·20 claims
- 1846US9690212B2Hybrid focus-exposure matrixTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 27, 2017·0 cites·19 claims
- 1940US8492236B1Step-like spacer profileRAO XUESONG·Filed 2012·Granted Jul 23, 2013·0 cites·20 claims
- 2039US2007167110A1Multi-zone carrier head for chemical mechanical polishing and cmp method thereofTSENG YU-HSIANG·Filed 2006·Application pending·0 cites
- 2136US8828858B2Spacer profile engineering using films with continuously increased etch rate from inner to outer surfaceRAO XUESONG·Filed 2012·Granted Sep 9, 2014·0 cites·11 claims
- 2235USD940250SBubble blowerNINGBO MERRYART GLOW TECH CO LTD·Filed 2020·Granted Jan 4, 2022·1 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →