Inventor · disambiguated record
Roger M. Young
Also filed as: YOUNG ROGER M · YOUNG ROGER MORGAN
15 granted patents·4 pending applications·55 citations·filing 1999–2013
90Inventor score
Top patents by PatentIndex Score
19 records- 0182US9652729B2Metrology managementHOFFMAN JR WILLIAM K·Filed 2011·Granted May 16, 2017·14 cites·17 claims
- 0282US7248936B1Automated tool recipe verification and correctionIBM·Filed 2006·Granted Jul 24, 2007·17 cites·20 claims
- 0371US7318206B2Offset determination for measurement system matchingIBM·Filed 2005·Granted Jan 8, 2008·5 cites·20 claims
- 0463US7853345B2Offset determination method for measurement system matchingIBM·Filed 2007·Granted Dec 14, 2010·1 cites·6 claims
- 0563US7542136B2Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughputIBM·Filed 2007·Granted Jun 2, 2009·1 cites·3 claims
- 0662US7742160B2Determining angle of incidence with respect to workpieceIBM·Filed 2008·Granted Jun 22, 2010·4 cites·20 claims
- 0759US7937177B2Manufacturing work in process management systemIBM·Filed 2007·Granted May 3, 2011·2 cites·20 claims
- 0856US8680871B2Alignment correction system and method of useIBM·Filed 2013·Granted Mar 25, 2014·0 cites·8 claims
- 0956US8411270B2Monitoring stage alignment and related stage and calibration targetZANGOOIE SHAHIN·Filed 2008·Granted Apr 2, 2013·1 cites·19 claims
- 1056US2009299511A1Method of releasing units in a production facilityIBM·Filed 2008·Application pending·0 cites
- 1155US8736275B2Alignment correction system and method of useIBM·Filed 2013·Granted May 27, 2014·0 cites·8 claims
- 1254US7592817B2Alignment correction system and method of useIBM·Filed 2007·Granted Sep 22, 2009·0 cites·2 claims
- 1353US7477365B2Optical spot geometric parameter determination using calibration targetsIBM·Filed 2007·Granted Jan 13, 2009·0 cites·7 claims
- 1452US8451008B2Alignment correction system and method of useFOSTER ROBERT J·Filed 2009·Granted May 28, 2013·0 cites·24 claims
- 1550US2009027660A1Optical spot geometric parameter determination using calibration targetsZANGOOIE SHAHIN·Filed 2008·Application pending·0 cites
- 1644US2009182529A1Determining signal quality of optical metrology toolIBM·Filed 2008·Application pending·0 cites
- 1742US2008201009A1Determining tool set matching using production dataIBM·Filed 2007·Application pending·0 cites
- 1840US7646491B2Determining azimuth angle of incident beam to waferIBM·Filed 2007·Granted Jan 12, 2010·0 cites·12 claims
- 1939US6303397B1Method for benchmarking thin film measurement toolsAGERE SYST GUARDIAN CORP·Filed 1999·Granted Oct 16, 2001·10 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →