Inventor · disambiguated record
Michael Littau
Also filed as: LITTAU MICHAEL · LITTAU MICHAEL E
4 granted patents·2 pending applications·236 citations·filing 2001–2007
82Inventor score
Top patents by PatentIndex Score
6 records- 0194US6606152B2Determination of center of focus by diffraction signature analysisACCENT OPTICAL TECH INC·Filed 2002·Granted Aug 12, 2003·108 cites·50 claims
- 0294US6429930B1Determination of center of focus by diffraction signature analysisACCENT OPTICAL TECH INC·Filed 2001·Granted Aug 6, 2002·84 cites·47 claims
- 0381US7110099B2Determination of center of focus by cross-section analysisACCENT OPTICAL TECH INC·Filed 2002·Granted Sep 19, 2006·23 cites·62 claims
- 0480US7119893B2Determination of center of focus by parameter variability analysisACCENT OPTICAL TECH INC·Filed 2004·Granted Oct 10, 2006·21 cites·34 claims
- 0541US2008018897A1Methods and apparatuses for assessing overlay error on workpiecesNANOMETRICS INC·Filed 2007·Application pending·0 cites
- 0635US2003197872A1Scatterometric measurement of undercut multi-layer diffracting signaturesFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →