Inventor · disambiguated record
Pradeep K. Govil
Also filed as: GOVIL PRADEEP K · GOVIL PRADEEP KUMAR
24 granted patents·1 pending application·619 citations·filing 1998–2022
96Inventor score
Files withASML HOLDING NV10ASML NETHERLANDS BV4SVG LITHOGRAPHY SYSTEMS INC3MANKALA KALYAN KUMAR2ASML US INC1
Top patents by PatentIndex Score
25 records- 0198US6509952B1Method and system for selective linewidth optimization during a lithographic processSILICON VALLEY GROUP·Filed 2000·Granted Jan 21, 2003·322 cites·15 claims
- 0296US10983431B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2019·Granted Apr 20, 2021·5 cites·20 claims
- 0393US10466585B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2016·Granted Nov 5, 2019·4 cites·20 claims
- 0490US6013401AMethod of controlling illumination field to reduce line width variationSVG LITHOGRAPHY SYSTEMS INC·Filed 1999·Granted Jan 11, 2000·78 cites·4 claims
- 0589US6556281B1Flexible piezoelectric chuck and method of using the sameASML US INC·Filed 2000·Granted Apr 29, 2003·36 cites·5 claims
- 0685US6097474ADynamically adjustable high resolution adjustable slitSVG LITHOGRAPHY SYSTEMS INC·Filed 1999·Granted Aug 1, 2000·55 cites·8 claims
- 0785US5895737AMethod for adjusting an illumination field based on selected reticle featureSVG LITHOGRAPHY SYSTEMS INC·Filed 1998·Granted Apr 20, 1999·49 cites·11 claims
- 0881US6573975B2DUV scanner linewidth control by mask error factor compensationFiled 2001·Granted Jun 3, 2003·23 cites·21 claims
- 0980US12066758B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 1076US11347142B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted May 31, 2022·0 cites·20 claims
- 1176US6922230B2DUV scanner linewidth control by mask error factor compensationASML HOLDING NV·Filed 2003·Granted Jul 26, 2005·16 cites·12 claims
- 1269USRE46099EMethod of using deformable mirror using piezoelectric actuators formed as an integrated circuitASML HOLDING NV·Filed 2015·Granted Aug 9, 2016·1 cites·14 claims
- 1366US7372614B2Method of using deformable mirror using piezoelectric actuators formed as an integrated circuitASML HOLDING NV·Filed 2005·Granted May 13, 2008·6 cites·5 claims
- 1461USRE45511EMethod of using deformable mirror using piezoelectric actuators formed as an integrated circuitGOVIL PRADEEP K·Filed 2010·Granted May 12, 2015·1 cites·16 claims
- 1559US8982317B2Cooling of actuator coilsWIENER ROBERTO B·Filed 2009·Granted Mar 17, 2015·2 cites·5 claims
- 1657US7142353B2System and method utilizing an electrooptic modulatorASML HOLDING NV·Filed 2004·Granted Nov 28, 2006·5 cites·23 claims
- 1752US7385750B2Spatial light modulator using an integrated circuit actuatorASML HOLDING NV·Filed 2003·Granted Jun 10, 2008·8 cites·13 claims
- 1851US7876420B2System and method utilizing an electrooptic modulatorASML HOLDING NV·Filed 2004·Granted Jan 25, 2011·2 cites·53 claims
- 1950US9130443B2Linear motor magnetic shield apparatusMANKALA KALYAN KUMAR·Filed 2009·Granted Sep 8, 2015·1 cites·21 claims
- 2047US9136751B2Linear motor magnetic shield apparatus for lithographic systemsMANKALA KALYAN KUMAR·Filed 2012·Granted Sep 15, 2015·0 cites·24 claims
- 2146US8879045B2Method utilizing an electrooptic modulatorTSACOYEANES JAMES G·Filed 2010·Granted Nov 4, 2014·0 cites·14 claims
- 2246US7224504B2Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of useASML HOLDING NV·Filed 2003·Granted May 29, 2007·5 cites·21 claims
- 2343US7265815B2System and method utilizing an illumination beam adjusting systemASML HOLDING NV·Filed 2005·Granted Sep 4, 2007·0 cites·18 claims
- 2440US2006164711A1System and method utilizing an electrooptic modulatorASML HOLDING NV·Filed 2005·Application pending·0 cites
- 2538US7525718B2Spatial light modulator using an integrated circuit actuator and method of making and using sameASML HOLDING NV·Filed 2008·Granted Apr 28, 2009·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →