Inventor · disambiguated record
Kenneth Regan
Also filed as: REGAN KENNETH · REGAN KENNETH P
8 granted patents·1 pending application·13 citations·filing 2005–2021
79Inventor score
Top patents by PatentIndex Score
9 records- 0170US7345856B2Method and apparatus for arc suppression in scanned ion beam processing equipmentTEL EPION INC·Filed 2005·Granted Mar 18, 2008·3 cites·9 claims
- 0268US8169769B2Electrostatic chuck power supplyREGAN KENNETH P·Filed 2010·Granted May 1, 2012·4 cites·21 claims
- 0368US7834327B2Self-biasing active load circuit and related power supply for use in a charged particle beam processing systemTEL EPION INC·Filed 2008·Granted Nov 16, 2010·2 cites·25 claims
- 0467US7948734B2Electrostatic chuck power supplyTEL EPION INC·Filed 2008·Granted May 24, 2011·3 cites·20 claims
- 0563US9540725B2Method and apparatus for beam deflection in a gas cluster ion beam systemTEL EPION INC·Filed 2015·Granted Jan 10, 2017·1 cites·20 claims
- 0662US10861674B2Compensated location specific processing apparatus and methodTEL EPION INC·Filed 2019·Granted Dec 8, 2020·0 cites·19 claims
- 0757US11715620B2Tuning gas cluster ion beam systemsTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Granted Aug 1, 2023·0 cites·20 claims
- 0856US10497540B2Compensated location specific processing apparatus and methodTEL EPION INC·Filed 2018·Granted Dec 3, 2019·0 cites·19 claims
- 0936US2011240602A1High-voltage gas cluster ion beam (gcib) processing systemTEL EPION INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →