Inventor · disambiguated record
Kouichiro Komatsu
Also filed as: KOMATSU KOUICHIRO
7 granted patents·381 citations·filing 1990–1995
89Inventor score
Technology areasG03F
Files withNIKON CORP7
Top patents by PatentIndex Score
7 records- 0195US5489986APosition detecting apparatusNIKON CORP·Filed 1994·Granted Feb 6, 1996·119 cites·8 claims
- 0292US5151750AAlignment apparatusNIKON CORP·Filed 1990·Granted Sep 29, 1992·88 cites·13 claims
- 0390US5347356ASubstrate aligning device using interference light generated by two beams irradiating diffraction gratingNIKON CORP·Filed 1992·Granted Sep 13, 1994·71 cites·19 claims
- 0487US5118953ASubstrate alignment apparatus using diffracted and reflected radiation beamsNIKON CORP·Filed 1990·Granted Jun 2, 1992·54 cites·11 claims
- 0573US5483348AApparatus for optically detecting a position of a markNIKON CORP·Filed 1994·Granted Jan 9, 1996·22 cites·20 claims
- 0664US5568257AAdjusting device for an alignment apparatusNIKON CORP·Filed 1995·Granted Oct 22, 1996·24 cites·19 claims
- 0734US5572325AApparatus for optically detecting a position of markNIKON CORP·Filed 1995·Granted Nov 5, 1996·3 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →