Inventor · disambiguated record
Ryou Son
Also filed as: SON RYOU
5 granted patents·5 pending applications·10 citations·filing 2007–2025
68Inventor score
Top patents by PatentIndex Score
10 records- 0180US8080109B2Film formation apparatus and method for using the sameOKADA MITSUHIRO·Filed 2008·Granted Dec 20, 2011·8 cites·15 claims
- 0262US9412565B2Temperature measuring method and plasma processing systemTOKYO ELECTRON LTD·Filed 2015·Granted Aug 9, 2016·1 cites·4 claims
- 0354US8183158B2Semiconductor processing apparatus and method for using sameTOMITA MASAHIKO·Filed 2007·Granted May 22, 2012·1 cites·14 claims
- 0450US2025191887A1Method for manufacturing componment and componentTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0544US2021104385A1Substrate support pedestal and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0644US2010032095A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0741US2021005477A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0839US2020294766A1Plasma generation unit and method of discriminating state of physical quantity which is used for plasma generationTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0937US10971341B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Apr 6, 2021·0 cites·2 claims
- 1035US10504698B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Dec 10, 2019·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →