Inventor · disambiguated record
Mizuna Suganuma
Also filed as: SUGANUMA MIZUNA
4 granted patents·1 pending application·10 citations·filing 2013–2017
66Inventor score
Files withNUFLARE TECHNOLOGY INC5
Top patents by PatentIndex Score
5 records- 0182US9224578B2Charged particle beam writing apparatus and method for acquiring dose modulation coefficient of charged particle beamNUFLARE TECHNOLOGY INC·Filed 2014·Granted Dec 29, 2015·6 cites·11 claims
- 0274US9852885B2Charged particle beam writing method, and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Dec 26, 2017·2 cites·10 claims
- 0374US9484185B2Charged particle beam writing apparatus, and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Nov 1, 2016·2 cites·10 claims
- 0440US2014138527A1Charged particle beam writing apparatus and charged particle beam dose check methodNUFLARE TECHNOLOGY INC·Filed 2013·Application pending·0 cites
- 0534US10032603B2Charged particle beam lithography apparatus and charged particle beam lithography methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Jul 24, 2018·0 cites·2 claims
Join the waitlist — get patent alerts
Get an alert when Mizuna Suganuma files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →