Inventor · disambiguated record
Alex Kabansky
Also filed as: KABANSKY ALEX
7 granted patents·186 citations·filing 2000–2011
87Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0190US6346490B1Process for treating damaged surfaces of low k carbon doped silicon oxide dielectric material after plasma etching and plasma cleaning stepsLSI LOGIC CORP·Filed 2000·Granted Feb 12, 2002·53 cites·20 claims
- 0289US6461972B1Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flowLSI LOGIC CORP·Filed 2000·Granted Oct 8, 2002·50 cites·13 claims
- 0385US6641698B2Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flowLSI LOGIC CORP·Filed 2002·Granted Nov 4, 2003·34 cites·14 claims
- 0483US7997288B2Single phase proximity head having a controlled meniscus for treating a substrateLAM RES CORP·Filed 2007·Granted Aug 16, 2011·8 cites·16 claims
- 0583US7351663B1Removing whisker defectsCYPRESS SEMICONDUCTOR CORP·Filed 2005·Granted Apr 1, 2008·11 cites·20 claims
- 0682US6346488B1Process to provide enhanced resistance to cracking and to further reduce the dielectric constant of a low dielectric constant dielectric film of an integrated circuit structure by implantation with hydrogen ionsLSI LOGIC CORP·Filed 2000·Granted Feb 12, 2002·30 cites·20 claims
- 0741US8313580B2Method for processing a substrate using a single phase proximity head having a controlled meniscusRAVKIN MIKE·Filed 2011·Granted Nov 20, 2012·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →