Inventor · disambiguated record
Yasushi Migita
Also filed as: MIGITA YASUSHI
5 granted patents·2 pending applications·62 citations·filing 2002–2009
80Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0188US7651571B2SusceptorKYOCERA CORP·Filed 2006·Granted Jan 26, 2010·20 cites·20 claims
- 0277US7646580B2Electrostatic chuck and wafer holding member and wafer treatment methodKYOCERA CORP·Filed 2006·Granted Jan 12, 2010·6 cites·18 claims
- 0373US7068489B2Electrostatic chuck for holding waferKYOCERA CORP·Filed 2003·Granted Jun 27, 2006·19 cites·5 claims
- 0471US8503155B2Wafer support member, method for manufacturing the same and electrostatic chuck using the sameMIGITA YASUSHI·Filed 2009·Granted Aug 6, 2013·6 cites·18 claims
- 0559US6643115B2Electrostatic chuckKYOCERA CORP·Filed 2002·Granted Nov 4, 2003·11 cites·5 claims
- 0646US2011229837A1Wafer Heating Apparatus, Electrostatic Chuck, and Method for Manufacturing Wafer Heating ApparatusKYOCERA CORP·Filed 2009·Application pending·0 cites
- 0739US2005215073A1Wafer supporting memberKYOCERA CORP·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →