Inventor · disambiguated record
Chihiro Taguchi
Also filed as: TAGUCHI CHIHIRO
3 granted patents·71 citations·filing 1999–2006
72Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0177US7067178B2Substrate table, production method therefor and plasma treating deviceTOKYO ELECTRON LTD·Filed 2002·Granted Jun 27, 2006·20 cites·10 claims
- 0273US6492612B1Plasma apparatus and lower electrode thereofTOKYO ELECTRON LTD·Filed 1999·Granted Dec 10, 2002·49 cites·9 claims
- 0365US7544393B2Substrate table, production method therefor and plasma treating deviceTOKYO ELECTRON LTD·Filed 2006·Granted Jun 9, 2009·2 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →