Inventor · disambiguated record
Geoffrey Norman Phillipps
Also filed as: PHILLIPPS GEOFFREY NORMAN
3 granted patents·13 citations·filing 2004–2006
62Inventor score
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0180US7562686B2Method and system for 3D alignment in wafer scale integrationASML NETHERLANDS BV·Filed 2005·Granted Jul 21, 2009·10 cites·11 claims
- 0269US7879514B2Lithographic method and patterning deviceASML NETHERLANDS BV·Filed 2006·Granted Feb 1, 2011·3 cites·15 claims
- 0337US7398177B2Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification methodASML NETHERLANDS BV·Filed 2004·Granted Jul 8, 2008·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →